Ultrathin Two-Dimensional Semiconductors for Novel Electronic Applications

Offering perspective on scientific and engineering aspects of 2D oxide semiconductors, this book discusses how to successfully engineer 2D metal oxides for practical applications. The work provides comprehensive data about wafer-scale deposition of 2D oxide semiconductors, from scientific discussions up to the planning of experiments and reliability testing of fabricated samples. It discusses wafer-scale ALD of 2D metal oxides and investigates ALD techniques. It covers sub-nanometer surface functionalization and device fabrication and post-treatment. It addresses a range of scientific and practical applications of 2D oxide materials for electronic and optoelectronic devices--